The rapid development of High-Precision Manufacturing Systems and the miniaturization of products have led to a growing need for tightly controlled micromanufacturing processes that can generate intricate micro-scale features with excellent precision and high uniformity. Laser micromachining has become an elementary enabling technology because of its non-contact nature and high energy density, as well as its versatility for the fabrication of complex geometries within metals, polymers, and ceramics, as well as composite materials.

The development of ultrafast laser systems and pulse modulation as well as beam control strategies has led to enhancements in the accuracy of machining, reduction of heat-affected zones, and the realization of submicron features having enhanced surface quality. At the same time, advanced microfabrication techniques such as lithography, LIGA, and additive microfabrication as well as elevated aspect ratio structuring are allowing intricate microcomponents with enhanced geometric fidelity along with functional integration. The combination of conventional micromanufacturing technologies, like microforming, microforging, and microcasting, along with microjoining, contributes to the generation of structurally strong components. Excellent surface condition and functional performance are achieved through nanofinishing processes, and micro- and nanometrology are necessary to accurately define, verify dimensionality, and validate the process at extremely small scales.
Motion systems, process tracking methods, and machine tool design are evolving to improve process control and stability, along with scalability. Hybrid fabrication approaches combining laser, traditional, and additive techniques are additionally employed to produce multi-material and high-performance microstructures. This special topic highlights recent advances in laser-based micromachining and combined microfabrication processes for high-precision manufacturing systems when it comes to micro- and nanoscale structures. Submissions are invited that report on experimental, analytical, and process-oriented studies on fabrication accuracy, quality of surface, process optimization, metrology integration, hybrid fabrication, and scalable micromanufacturing methods.